Controlling temperature is imperative in the production of semiconductors. With over 20 years of working in the semiconductor industry, BV Thermal Systems is aware of the needs and requirements of the semiconductor fabricators and also the problems that are so often encountered. This experience has allowed us to develop and continue to develop units specifically for the semiconductor industry.
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| Etch/Ashing, Wet Etch- the Rack-Mounted Chiller was designed specifically for poly, metal, and trans-ambient oxide dry etchers. |
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Wet benches- the Fluid to Fluid Heat Exchanger is designed for controlling the temperature of corrosive fluids and ultra-purity fluids. | SEMI, Mass Spectroscopy (MS) and Inductively Coupled Plama and Atomic Absorption Spectrometry (ICP/AA) – the Recirculating Mercury Chillers are incredibly compact and efficient in controlling the fluid temperature and are easily customized to meet your specific needs. | ||||
Applications of Current Semiconductor Manufacturing Customers
| CVD/PVD | CMP | |
| MBE | Crystal Growning | |
| Etch/Ashing, Wet Etch | Cutting Dicing | |
| Implant | Die Packaging and Die Testing | |
| TRP | Handlers and testers | |
| Inductively Coupled Plasma and Atomic Absorption Spectrometry | Polishing/Grinding | |
| Lithography | Cabinet Cooling | |
| Mass Spectrosocopy (MS) | MOCVD |
