Semiconductor Chiller
Silicon Wafer Manufacturing & Research
209-522-3701
Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers, the recirculating semiconductor chiller features a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chiller is designed to provide years of reliable and accurate liquid temperature control.
The Semiconductor Chiller from BV Thermal Systems is designed for silicon wafer manufacturing and research and features continuous cooling with temperature from +5° to +27°C. With corrosion free wetted surfaces and a large selection of options the chiller may be designed and manufactured to your exact requirements.
Designed to fit a standard 19″ rack and with environmentally friendly CFC refrigerant our Rack-Mounted Chiller features easy to use time tested components such as an adjustable temperature high & low alarm, hot gas by-pass valve and a 100 million cycle solenoid valve.
| MODEL | MC025 | MC033 | MC050 | MC075 | MC100 | MC150 | MC200 |
|---|---|---|---|---|---|---|---|
| Cooling Capacity | 828 watts @ 20°C | 1073 watts @ 20°C | 1764 watts @ 20°C | 2393 watts @ 20°C | 3163 watts @ 20°C | 4895 watts @ 20°C | 7000 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c |
| Pump | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 4.0 GPM to 99 PSI | 4.0 GPM to 99 PSI |
| Reservoir Volume | 1.3 gal | 1.3 gal | 1.3 gal | 1.3 gal | 2 gal | 2 gal | 7 gal |
| Dimensions (w x d x h) in | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 36 x 27 x 29.75 | 36 x 27 x 29.75 | 38 x 32 x 39 |
| Power Requirements | 115V, 9A | 115V, 12A | 200-230V, 8A | 200-230V, 10A | 200-230V, 12A | 200-230V, 20A | 200-230V, 17A |
| Weight (lbs) | 130 | 130 | 142 | 180 | 258 | 270 | 404 |
| MODEL | MC300 | MC400 | MC500 | MC600 | MC800 | MC1000 | MC1500 |
|---|---|---|---|---|---|---|---|
| Cooling Capacity | 10,000 watts @ 20°C | 12,800 watts @ 20°C | 16,400 watts @ 20°C | 20,000 watts @ 20°C | 26,000 watts @ 20°C | 34,500 watts @ 20°C | 52,000 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c | +5°c to +35°c |
| Pump | 4.0 GPM to 99 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 20 GPM to 40 PSI |
| Reservoir Volume | 7 gal | 7 gal | 7 gal | 7 gal | 7 gal | 7 gal | 7 gal |
| Dimensions (w x d x h) in | 38.5 x 32 x 39 | 48.5 x 33 x 48 | 48.5 x 33 x 48 | 65 x 45 x 42.25 | 65 x 45 x 42.25 | 65 x 45 x 42.25 | 65 x 45 x 42.25 |
| Power Requirements | 200-230V, 20A | 200-230V-3, 16A | 200-230V-3, 20A | 200-230V-3, 22A | 200-230V-3, 26A | 460V-3, 20A | 460V-3, 28A |
| Weight (lbs) | 442 | 484 | 531 | 720 | 825 | 955 | 1100 |
Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers, the recirculating semiconductor chiller features a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chiller is designed to provide years of reliable and accurate liquid temperature control.
Features Include:
| •Full featured PID controller with easy Auto-tuning | •Level, flow & temperature remote signals |
| •External pressure – flow adjustment | •Corrosion free wetted surfaces |
| •Adjustable high & low temperature alarms |