Semiconductor Chillers

For Silicon Wafer Manufacturing and Research

Semiconductor Chillers from BV Thermal Systems are designed for silicon wafer manufacturing and research and feature continuous cooling with temperature from +5° to +27°C. A low profile design with high quality non-marring locking casters, the Semiconductor Chillers provide a small footprint with exceptional performance and unmatched reliability.

Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers, the recirculating semiconductor chillers feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chillers are designed to provide years of reliable and accurate liquid temperature control.

•Full featured PID controller with easy Auto-tuning
•Level, flow & temperature remote signals
•External pressure – flow adjustment
•Seamless polyethylene tank with easy fill 3″ port
•Adjustable high & low temperature alarms

MODEL	MC025	MC033	MC050	MC075
Cooling Capacity	828 watts @ 20°C	1073 watts @ 20°C	1764 watts @ 20°C	2681 watts @ 20°C
Stability	±0.1°C	±0.1°C	±0.1°C	±0.1°C
Temperature Range	+5°c to +27°c	+5°c to +27°c	+5°c to +27°c	+5°c to +27°c
Pump	2.2 GPM to 99 PSI	2.2 GPM to 99 PSI	2.2 GPM to 99 PSI	2.2 GPM to 99 PSI
Reservoir Volume	1.3 gal	1.3 gal	1.3 gal	1.3 gal
Dimensions (w x d x h) in	14.5 x 22 x 29	14.5 x 22 x 29	14.5 x 22 x 29	14.5 x 22 x 29
Power Requirements	115V, 9A	115V, 12A	200-230V, 8A	200-230V, 10A
Weight (lbs)	130	130	142	180

MODEL	MC100	MC150	MC200
Cooling Capacity	3163 watts @ 20°C	4895 watts @ 20°C	7000 watts @ 20°C
Stability	±0.1°C	±0.1°C	±0.1°C
Temperature Range	+5°c to +27°c	+5°c to +27°c	+5°c to +27°c
Pump	2.2 GPM to 99 PSI	4.0 GPM to 99 PSI	4.0 GPM to 99 PSI
Reservoir Volume	2 gal	2 gal	7 gal
Dimensions (w x d x h) in	36 x 27 x 29.75	36 x 27 x 29.75	38 x 32 x 39
Power Requirements	200-230V, 12A	200-230V, 20A	200-230V, 17A
Weight (lbs)	258	270	404

MODEL	MC300	MC400	MC500	MC600
Cooling Capacity	10,000 watts @ 20°C	12,800 watts @ 20°C	16,400 watts @ 20°C	20,000 watts @ 20°C
Stability	±0.1°C	±0.1°C	±0.1°C	±0.1°C
Temperature Range	+5°c to +27°c	+5°c to +27°c	+5°c to +27°c	+5°c to +275°c
Pump	4.0 GPM to 99 PSI	10 GPM to 40 PSI	10 GPM to 40 PSI	10 GPM to 40 PSI
Reservoir Volume	7 gal	7 gal	7 gal	7 gal
Dimensions (w x d x h) in	38.5 x 32 x 39	48.5 x 33 x 48	48.5 x 33 x 48	48.5 x 33 x 48
Power Requirements	230V, 20A	230V-3, 16A	230V-3, 20A	230V-3, 22A
Weight (lbs)	442	484	531	720

MODEL

MC800

MC1000

MC1500

Cooling Capacity

26,000 watts @ 20°C

34,500 watts @ 20°C

52,000 watts @ 20°C

Stability

±0.1°C

Temperature Range

+5°c to +27°c

Pump

10 GPM to 40 PSI

20 GPM to 40 PSI

Reservoir Volume

7 gal

Dimensions (w x d x h) in

48.5 x 33 x 48

48.5 x 33 x 60

Power Requirements

230V-3, 26A

460V-3, 20A

460V-3, 28A

Weight (lbs)

825

955

1100